6/8寸??
Hardware Configuration
? 6”/8” Comp. Wafer sorter
? Dual Arm ATM robot x1
? Optical wafer Aligner x 1
? 2~4 Flat Station with wafer slip sensor
? Cognex wafer ID reader x1
? 6”/8” change slider
? Wafer present sensor
? Class #1 FFU x 1
? Foot-print: 1200 x 1050 x 1860mm (WxDxH)
? Ceramic blade x 2
? Industrial PC & Touch Panel
? 3 or 4 colors Single Tower
8/12寸
Hardware Configuration
? 8”/12” Comp. Wafer sorter
? Dual Arm ATM robot x2
? Optical wafer Aligner x 2
? 300mm Load Port x 2 ; 150mm/200mm flat station x 2
? Cognex wafer ID reader x2
? 8”/12 change slider
? Wafer present sensor
? Class #1 FFU x 2
? Foot-print: 1600 x 1750 x 2440mm (WxDxH)
? Ceramic blade x 4
? Industrial PC & Touch Panel
? 3 or 4 colors Single Tower
